Specifications:

Measurement technique - Coherence Correlation Interferometry

Vertical range (Z) - 2.2 mm as standard (>10 mm with Z-stitching)

Vertical resolution [max] - 0.01 nm [0.1 Å]

Noise floor (Z) <0.08 nm [0.8 Å] 1

Repeatability of surface RMS (Z) <0.02 nm [0.2 Å] 2

Max. Measurement area (X, Y) 6.6 mm (>75 mm with X, Y stitching)

Optical resolution (X, Y) 0.4 - 0.6μm (surface dependent)

Application: 3D surface roughness measurement (non-contact) for soft materials, coatings also, Step height measurement, To perform various surface analysis viz. fractal, motif, bearing ratio, spectral, autocorrelation etc.